JPS6225469Y2 - - Google Patents

Info

Publication number
JPS6225469Y2
JPS6225469Y2 JP18546383U JP18546383U JPS6225469Y2 JP S6225469 Y2 JPS6225469 Y2 JP S6225469Y2 JP 18546383 U JP18546383 U JP 18546383U JP 18546383 U JP18546383 U JP 18546383U JP S6225469 Y2 JPS6225469 Y2 JP S6225469Y2
Authority
JP
Japan
Prior art keywords
wafer
hole
pin
load arm
drive mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18546383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6093627U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18546383U priority Critical patent/JPS6093627U/ja
Publication of JPS6093627U publication Critical patent/JPS6093627U/ja
Application granted granted Critical
Publication of JPS6225469Y2 publication Critical patent/JPS6225469Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP18546383U 1983-11-30 1983-11-30 ウエハの搬送機構 Granted JPS6093627U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18546383U JPS6093627U (ja) 1983-11-30 1983-11-30 ウエハの搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18546383U JPS6093627U (ja) 1983-11-30 1983-11-30 ウエハの搬送機構

Publications (2)

Publication Number Publication Date
JPS6093627U JPS6093627U (ja) 1985-06-26
JPS6225469Y2 true JPS6225469Y2 (en]) 1987-06-30

Family

ID=30400850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18546383U Granted JPS6093627U (ja) 1983-11-30 1983-11-30 ウエハの搬送機構

Country Status (1)

Country Link
JP (1) JPS6093627U (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013016605A (ja) * 2011-07-04 2013-01-24 Tatsumo Kk 基板搬送装置、基板搬送方法および塗布装置
JP7277848B1 (ja) * 2021-10-28 2023-05-19 ダイキン工業株式会社 スクロール圧縮機及び冷凍装置

Also Published As

Publication number Publication date
JPS6093627U (ja) 1985-06-26

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